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Hydrogenation and hybridization in hard W-C:H coatings prepared by hybrid PVD-PECVD method with methane and acetylene

  1. Title statementHydrogenation and hybridization in hard W-C:H coatings prepared by hybrid PVD-PECVD method with methane and acetylene / aut. František Lofaj, Margita Kabátová, Jozef Dobrovodský, Grzegorz Cempura
    Main entry-name Lofaj, František (Author)
    Another responsib. Kabátová, Margita (Author)
    Dobrovodský, Jozef, 1955- Z2 (Author) - MTF Ústav výskumu progresívnych technológií
    Cempura, Grzegorz (Author)
    In International Journal of Refractory Metals and Hard Materials. -- ISSN 0263-4368. -- Vol. 88, (2020), s. 1-12
    Subj. Headings hybrid PVD-PECVD
    hydrogenation
    hybridization
    hardness
    coatings
    LanguageEnglish
    URLhttps://www.sciencedirect.com/science/article/pii/S0263436819304652?via%3Dihub
    Document kindRBX - článok z periodika
    CategoryADC - Scientific titles in foreign carented magazines and noticed year-books
    Category (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    In databases CC: 000517349800028
    WOS: 000517349800028
    DOI: 10.1016/j.ijrmhm.2020.105211
    SCOPUS: 2-s2.0-85078997217
    Year2020
    article

    article

Number of the records: 1  

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