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The influence of deposition parameters on TiB2 thin films prepared by DC magnetron sputtering

  1. Title statementThe influence of deposition parameters on TiB2 thin films prepared by DC magnetron sputtering
    Main entry-name Grančič, B. (Author)
    Another responsib. Mikula, M. (Author)
    Hrubá, Ľuboslava, 1979- (Author) - SjF Katedra výrobných systémov
    Gregor, Maroš (Author)
    Štefečka, Miloslav (Author)
    Csuba, A. (Author)
    Dobročka, Edmund, 1955- (Author)
    Plecenik, Andrej (Author)
    Kúš, Peter (Author)
    In Vacuum. -- Vol. 80, No. 1-3 (2005), s.174-177
    LanguageEnglish
    Document kindRBX - článok z periodika
    CategoryADC - Scientific titles in foreign carented magazines and noticed year-books
    Category (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
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