Design of athermal SiON waveguide structure for telecom photonics integrated circuits /
Chovan Jozef ; 033000  Uherek František ; 033000 Seyringer Dana Dohnal Fadi Seyringer Heinz Látal Jan Šiška Petr
23rd Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics : . Art. no. 135080P [4] s.
athermal linear expansion optical waveguide photonics integrated circuit PMMA SiON thermal optical coefficient
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