Large area deposition of boron doped diamond films by linear antena MWCVD

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	CREPC201709 CREPC201710 CREPC201711 CREPC022018 CREPC201802 CREPC201803 CREPC201806
Title statement	Large area deposition of boron doped diamond films by linear antena MWCVD / aut. Marián Marton, Marian Vojs, Pavol Michniak, Miroslav Behúl, Miroslav Mikolášek, Robert Redhammer
Main entry-name	Marton, Marián, 1980- (Author) - FEI Ústav elektroniky a fotoniky
Another responsib.	Vojs, Marian, 1979- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Michniak, Pavol, 1986- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Behúl, Miroslav, 1989- Z3 (Author) - FEI Ústav elektroniky a fotoniky
	Mikolášek, Miroslav, 1983- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Redhammer, Robert, 1963- Z7 (Author) - FEI Ústav elektroniky a fotoniky
In	ADEPT 2017 [302 s.] / International conference on advances in electronic and photonic technologies. -- Žilina : University of Žilina, 2017. -- ISBN 978-80-554-1342-6. -- S. 154-157
Subj. Headings	boron doped diamond films
	large area deposition
	CVD
	BDD
Language	English
Document kind	RZB - článok zo zborníka
Category	AFD - Reports at home scientific conferences
Category (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Year	2017

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Number of the records: 1