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PECVD silicon carbide thin films for harsh environment applications
CREPC201709 CREPC201710 CREPC201711 CREPC022018 CREPC201802 CREPC201803 CREPC201806 Title statement PECVD silicon carbide thin films for harsh environment applications / aut. Jozef Huran, Pavol Boháček, Ladislav Hrubčín, Vlasta Sasinková, Angela Kleinová, Miroslav Mikolášek, Alexander P Kobzev, E Kováčová, J Arbet Main entry-name Huran, Jozef (Author) Another responsib. Boháček, Pavol (Author) Hrubčín, Ladislav (Author) Sasinková, Vlasta (Author) Kleinová, Angela (Author) Mikolášek, Miroslav, 1983- Z2 (Author) - FEI Ústav elektroniky a fotoniky Kobzev, Alexander P. (Author) Kováčová, E. (Author) Arbet, Juraj (Author) In ADEPT 2017 [302 s.] / International conference on advances in electronic and photonic technologies. -- Žilina : University of Žilina, 2017. -- ISBN 978-80-554-1342-6. -- S. 215-218 Subj. Headings SiC film PECVD structural and electrical properties harsh environment Language English Document kind RZB - článok zo zborníka Category AFD - Reports at home scientific conferences Category (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Year 2017 
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Number of the records: 1