Raman spectroscopy used to assess the temperature and mechanical stress in thin films of microelectronic structures

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	CREPC201711 CREPC022018 CREPC201802 CREPC201803 CREPC201806
Title statement	Raman spectroscopy used to assess the temperature and mechanical stress in thin films of microelectronic structures / aut. Magdaléna Kadlečíková, Ľubomír Vančo, Juraj Breza, Juraj Priesol, Alexander Šatka
Main entry-name	Kadlečíková, Magdaléna, 1956- (Author) - FEI Ústav elektroniky a fotoniky
Another responsib.	Vančo, Ľubomír, 1983- Z2 (Author) - Centrum STU pre nanodiagnostiku
	Breza, Juraj, 1951- Z1 (Author) - FEI Ústav elektroniky a fotoniky
	Priesol, Juraj, 1986- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Šatka, Alexander, 1960- Z1 (Author) - FEI Ústav elektroniky a fotoniky
In	IMAPS flash conference 2017 / International microelectronics assembly and packaging society. -- Brno : University of Technology, 2017. -- ISBN 978-80-214-5535-1. -- USB, [2] s.
Language	English
Document kind	RZB - článok zo zborníka
Category	AFC - Reports at international scientific conferences
Category (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Year	2017

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