Design, fabrication and characterization of SiOx/SiON/SiO2/Si structures for passive optical waveguides realization

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	CREPC022018 CREPC201802 CREPC201803 CREPC201806
Title statement	Design, fabrication and characterization of SiOx/SiON/SiO2/Si structures for passive optical waveguides realization / aut. Jozef Chovan, Daniel Figura, Juraj Chlpík, Dušan Lorenc, Vlastimil Řeháček, František Uherek
Main entry-name	Chovan, Jozef, 1974- (Author)
Another responsib.	Figura, Daniel (Author) Z9 - FEI Ústav elektroniky a fotoniky
	Chlpík, Juraj, 1975- Z1 (Author) - FEI Ústav jadrového a fyzikálneho inžinierstva
	Lorenc, Dušan (Author)
	Řeháček, Vlastimil, 1957- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Uherek, František, 1954- Z1 (Author) - FEI Ústav elektroniky a fotoniky
In	Photonics, Devices and Systems VII [342 s.] / International Conference on Photonics, Devices and Systems. -- Washington : SPIE, 2017. -- ISBN 978-1-510-61702-5. -- Art. no. 106030N [7] s.
Subj. Headings	oxynitrides
	silicon
	waveguide
	integrated photonics
	spectroscopic ellipsometry
Language	English
Document kind	RZB - článok zo zborníka
Category	AFC - Reports at international scientific conferences
Category (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
In databases
Year	2017

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Number of the records: 1