Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching

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Title statement	Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching / aut. Marián Marton, Mário Ritomský, Pavol Michniak, Miroslav Behúl, Vlastimil Řeháček, Robert Redhammer, Andrej Vincze, Martin Papula, Marian Vojs
Main entry-name	Marton, Marián, 1980- (Author) - FEI Ústav elektroniky a fotoniky
Another responsib.	Ritomský, Mário, 1993- (Author)
	Michniak, Pavol, 1986- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Behúl, Miroslav, 1989- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Řeháček, Vlastimil, 1957- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Redhammer, Robert, 1963- (Author)
	Vincze, Andrej, 1975- (Author)
	Papula, Martin (Author)
	Vojs, Marian, 1979- Z2 (Author) - FEI Ústav elektroniky a fotoniky
In	Vacuum. -- ISSN 0042-207X. -- Vol. 170, (2019), Art. no. 108954 [6] s.
Subj. Headings	boron doped diamond
	plasma etching
	Self-masking
	nanostructured surface
Language	English
URL	https://www.sciencedirect.com/science/article/pii/S0042207X18324588
Document kind	RZB - článok zo zborníka
Category	ADC - Scientific titles in foreign carented magazines and noticed year-books
Category (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
In databases
Year	2019

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Number of the records: 1