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Fabrication of PhC structures by using nanoimprint lithography and their optical properties

Title statement	Fabrication of PhC structures by using nanoimprint lithography and their optical properties / aut. Juraj Nevřela, Anton Kuzma
Main entry-name	Nevřela, Juraj, 1989- (Author) - FEI Ústav elektroniky a fotoniky
Another responsib.	Kuzma, Anton, 1987- Z2 (Author) - FEI Ústav elektroniky a fotoniky
In	Technology Transfer: fundamental principles and innovative technical solutions / Technology Transfer: fundamental principles and innovative technical solutions. -- Tallinn : Scientific Route, 2019. -- ISSN 2585-6839. -- S. 29-31
Subj. Headings	AFM
	LED
	RIE
	RCWA
	PhC
	nanostructure
	next generation of nanoscale lithography
	NIL
	hard stamp
	UV-exposure
Language	English
URL	http://eu-jr.eu/ttfpits/article/view/1020
Document kind	RZB - článok zo zborníka
Category	AFC - Reports at international scientific conferences
Category (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
In databases	DOI: 10.21303/2585-6847.2019.001020
Year	2019

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Number of the records: 1