Atmospheric pressure microwave plasma for aluminum surface cleaning

Number of the records: 1

Title statement	Atmospheric pressure microwave plasma for aluminum surface cleaning / aut. Lucia Bónová, Weikun Zhu, Dhruval K Patel, Daniel V Krogstad, David N Ruzic
Main entry-name	Bónová, Lucia, 1982- (Author) - MTF Ústav výskumu progresívnych technológií
Another responsib.	Zhu, Weikun (Author)
	Patel, Dhruval K. (Author)
	Krogstad, Daniel V. (Author)
	Ruzic, David N. (Author)
In	Journal of vacuum science and technology. Part A. Vacuum, surfaces and films. -- ISSN 0734-2101. -- Vol. 38, iss. 2 (2020), s. 1-6
Language	English
URL	https://avs.scitation.org/doi/full/10.1116/1.5132912
Document kind	RBX - článok z periodika
Category	ADC - Scientific titles in foreign carented magazines and noticed year-books
Category (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
In databases
Year	2020

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Number of the records: 1