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TiO2 sensoric structures with controlled extension of their active area by electron-beam lithography and reactive ion etching techniques
Title statement TiO2 sensoric structures with controlled extension of their active area by electron-beam lithography and reactive ion etching techniques / aut. Pavol Nemec, Ivan Hotový, Vlastimil Řeháček, Robert Andok Main entry-name Nemec, Pavol, 1975- (Author) - FEI Ústav elektroniky a fotoniky Another responsib. Hotový, Ivan, 1957- Z1 (Author) - FEI Ústav elektroniky a fotoniky Řeháček, Vlastimil, 1957- Z2 (Author) - FEI Ústav elektroniky a fotoniky Andok, Robert Z5 (Author) In APCOM 2021 [351 s.] / International conference on applied physics of condensed matter. -- Melville : AIP Publishing, 2021. -- ISBN 978-0-7354-4138-5. -- Art. no. 060003 [6] s. Language English Document kind RZB - článok zo zborníka Category AFD - Reports at home scientific conferences Category (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok z podujatia In databases WOS: 000859097600054
DOI: 10.1063/5.0067745
SCOPUS: 2-s2.0-85118838742Year 2021 
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Number of the records: 1