- On the preparation of GaN device cross-sections for EBIC analysis
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On the preparation of GaN device cross-sections for EBIC analysis

  1. Title statementOn the preparation of GaN device cross-sections for EBIC analysis / aut. Juraj Priesol, Alexander Šatka, Daniel Haško, František Uherek
    Main entry-name Priesol, Juraj, 1986- (Author) - FEI Ústav elektroniky a fotoniky
    Another responsib. Šatka, Alexander, 1960- Z1 (Author) - FEI Ústav elektroniky a fotoniky
    Haško, Daniel, 1975- Z5 (Author)
    Uherek, František, 1954- Z1 (Author) - FEI Ústav elektroniky a fotoniky
    In Fotonika 2022 [116 s.] / Michalka, Miroslav. -- Bratislava : Medzinárodné laserové centrum, 2022. -- ISBN 978-80-8240-033-8. -- S. 37-40
    Subj. Headings Cross-section
    mechanical polishing
    nano-polishing
    grinding
    vertical GaN
    EBIC
    LanguageEnglish
    Document kindRZB - článok zo zborníka
    CategoryAFD - Reports at home scientific conferences
    Category (from 2022)V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
    Type of documentpríspevok z podujatia
    Year2022
    article

    article

Number of the records: 1  

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