Problems concerning the demolding process of nano imprint lithography

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Title statement	Problems concerning the demolding process of nano imprint lithography / aut. Jaroslava Škriniarová, Robert Andok, Magdaléna Kadlečíková, Juraj Nevřela
Main entry-name	Škriniarová, Jaroslava, 1954- (Author)
Another responsib.	Andok, Robert Z5 (Author)
	Kadlečíková, Magdaléna, 1956- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Nevřela, Juraj, 1989- Z2 (Author) - FEI Ústav elektroniky a fotoniky
In	APCOM 2022 [364 s.] / International conference on applied physics of condensed matter. -- Melville : AIP Publishing, 2023. -- ISBN 978-0-7354-4479-9. -- Art. no. 030011 [5] s.
Language	English
Document kind	RZB - článok zo zborníka
Category	AFD - Reports at home scientific conferences
Category (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Type of document	príspevok z podujatia
In databases
Year	2023

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Number of the records: 1