Exploring the impact of metal ion implantation on the surface evolution of TiN thin films

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Title statement	Exploring the impact of metal ion implantation on the surface evolution of TiN thin films
Main entry-name	Popovič, M. (Author)
Another responsib.	Tošič, D. (Author)
	Noga, Pavol, 1982- Z1 (Author) - MTF Ústav výskumu progresívnych technológií
	Vaňa, Dušan, 1986- Z2 (Author) - MTF Ústav výskumu progresívnych technológií
	Novakovič, M. (Author)
In	Ceramics International. -- ISSN 0272-8842. -- in press, 30 May (2025), s. 12
Subj. Headings	Metal ion implantation
	TiN thin films
	Surface morphology
Language	English
URL	https://www.sciencedirect.com/science/article/pii/S0272884225025854
Document kind	RBX - článok z periodika
Category	ADC - Scientific titles in foreign carented magazines and noticed year-books
Category (from 2022)	V3 - Vedecký výstup publikačnej činnosti z časopisu
Type of document	článok
In databases
Year	2025

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Number of the records: 1