- Investigation of the material properties of thin epitaxial Ga2O3 film…
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Investigation of the material properties of thin epitaxial Ga2O3 films grown by liquid-injection MOCVD on (111) Si with AlN buffer

  1. Title statementInvestigation of the material properties of thin epitaxial Ga2O3 films grown by liquid-injection MOCVD on (111) Si with AlN buffer / aut. Miriam Krettová, Kristína Hušeková, Mateusz Wosko, Edmund Dobročka, Zdenko Zápražný, Iryna Kozak, Hemendra Chouhan, Fridrich Egyenes, Ondrej Pohorelec, Milan Ťapajna, Regina Paszkiewicz, Filip Gucmann
    Main entry-name Krettová, Miriam, 1997- (Author) - FEI Ústav elektroniky a fotoniky
    Another responsib. Hušeková, Kristína (Author)
    Wosko, Mateusz (Author)
    Dobročka, Edmund, 1955- Z5 (Author)
    Zápražný, Zdenko, 1980- (Author)
    Kozak, Iryna (Author)
    Chouhan, Hemendra, 1992- Z3 (Author) - FEI Ústav elektroniky a fotoniky
    Egyenes, Fridrich (Author)
    Pohorelec, Ondrej, 1995- (Author)
    Ťapajna, Milan, 1977- (Author)
    Paszkiewicz, Regina (Author)
    Gucmann, Filip, 1987- (Author)
    In ELITECH´25 [CD ROM, 208 s.] / Kozáková, Alena. -- Bratislava : Vydavateľstvo Spektrum STU, 2025. -- ISBN 978-80-227-5492-7. -- [5] s.
    Subj. Headings Ga2O3
    MOCVD
    AlN
    Si
    heteroepitaxy
    LanguageEnglish
    Document kindRZB - článok zo zborníka
    CategoryAFD - Reports at home scientific conferences
    Category (from 2022)V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
    Type of documentpríspevok z podujatia
    Year2025
    article

    article

Number of the records: 1  

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