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X-Ray Metrology in Semiconductor Manufactoring
Title statement X-Ray Metrology in Semiconductor Manufactoring Main entry-name Bowen, D.Keitn (Author) Another responsib. Tanner, Brian K (Author) Issue data Boca Raton : CRC Press, 2006 Phys.des. 279 s ISBN 0-8493-3928-6 Subj. Headings röntgenová spektroskopia röntgenová fluorescenčná analýza náuka o materiáloch röntgenografia fyzika tuhých látok polovodiče integrované obvody polovodičové platne fluoroskopia UDC 539.26 543.422.8 548.73 620.179.152 Country United States Language English Document kind AMG - monografia book
Barcode Call number of location Call number Location Sublocation Info 284EK86654 E*86654 Fakulta elektrotechniky a informatiky Katedra mikroelektroniky FEI unavailable
Number of the records: 1