Number of the records: 1

X-Ray Metrology in Semiconductor Manufactoring

Title statement	X-Ray Metrology in Semiconductor Manufactoring
Main entry-name	Bowen, D.Keitn (Author)
Another responsib.	Tanner, Brian K (Author)
Issue data	Boca Raton : CRC Press, 2006
Phys.des.	279 s
ISBN	0-8493-3928-6
Subj. Headings	röntgenová spektroskopia
	röntgenová fluorescenčná analýza
	náuka o materiáloch
	röntgenografia
	fyzika tuhých látok
	polovodiče
	integrované obvody
	polovodičové platne
	fluoroskopia
UDC	539.26
	543.422.8
	548.73
	620.179.152
Country	United States
Language	English
Document kind	AMG - monografia

book

Barcode	Call number of location	Call number	Location	Sublocation	Info
284EK86654		E*86654	Fakulta elektrotechniky a informatiky	Katedra mikroelektroniky FEI	unavailable

citace PRO

Number of the records: 1