Using Spreading Resistance Profiling and Simulations for Monitoring of Phosphorus Contamination in Ion Implantation of Arsenic

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Title statement	Using Spreading Resistance Profiling and Simulations for Monitoring of Phosphorus Contamination in Ion Implantation of Arsenic
Main entry-name	Kuruc, Marián (Author)
Another responsib.	Hulényi, Ladislav, 1938- (Author) - FEI Katedra mikroelektroniky
	Kinder, Rudolf, 1940- (Author) - FEI Ústav elektroniky a fotoniky
In	EDS´08. Electronic Devices and Systems IMAPS CS International Conference 2008 : Brno, Czech Republic, 10.-11.9.2008. -- Brno : VUT v Brně, 2008. -- ISBN 978-80-214-3717-3. -- s.103-108
Language	English
Document kind	RZB - článok zo zborníka
Category	AFC - Reports at international scientific conferences
Category (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Year	2008

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