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Preparation and Properties of Micro-Hotplates for Gas Sensors Based on GaAs
Title statement Preparation and Properties of Micro-Hotplates for Gas Sensors Based on GaAs Main entry-name Tengeri, David (Author) Another responsib. Pullmannová, Andrea, 1982- (Author) - FEI Katedra mikroelektroniky Hotový, Ivan, 1957- (Author) - FEI Ústav elektroniky a fotoniky Řeháček, Vlastimil, 1957- (Author) - FEI Ústav elektroniky a fotoniky Haščík, Štefan (Author) Lalinský, Tibor (Author) In ASDAM 2008. The Seventh International Conference on Advanced Semiconductor Devices and Microsystems /. -- Piscataway : Institute of Electrical and Electronics Engineers, 2008. -- ISBN 978-1-4244-2325-5. -- s.323-326 Language English Document kind RZB - článok zo zborníka Category AFC - Reports at international scientific conferences Category (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Year 2008 
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