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Monitoring of Phosphorus Cross-Contamination in Ion Implantation of Arsenic by Spreading Resistance Profiling and Simulations
Title statement Monitoring of Phosphorus Cross-Contamination in Ion Implantation of Arsenic by Spreading Resistance Profiling and Simulations Main entry-name Kuruc, Marián (Author) Another responsib. Hulényi, Ladislav, 1938- (Author) - FEI Katedra mikroelektroniky Kinder, Rudolf, 1940- (Author) - FEI Ústav elektroniky a fotoniky In ElectroScope [elektronický zdroj]. -- mimoriadne č. (konference EDS) (2008), s.http://147.228.94.30/index.php?option=com_content&task=view&id=154&Itemid=38 Language English Document kind RBX - článok z periodika Category GHG - Works carried in Internet Category (from 2022) I3 - Iný výstup publikačnej činnosti z časopisu 
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Number of the records: 1