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A Combined X-ray, Ellipsometry and Atomic Force Microscopy Study on Thin Parylene-C Films
Title statement A Combined X-ray, Ellipsometry and Atomic Force Microscopy Study on Thin Parylene-C Films Main entry-name Flesch, G.H. (Author) Another responsib. Werzer, Oliver (Author) Weis, Martin (Author) - FEI Katedra fyziky Jakabovič, Ján, 1951- (Author) - FEI Ústav elektroniky a fotoniky Kováč, Jaroslav, 1947- (Author) - FEI Ústav elektroniky a fotoniky Haško, Daniel, 1975- (Author) Jakopic, G. (Author) Wondergem, H.J. (Author) Resel, Roland (Author) In Physica Status Solidi (A)-Applications and Materials Science. -- Vol. 206 (2009), s.1727-1730 Language English Document kind RBX - článok z periodika Category ADC - Scientific titles in foreign carented magazines and noticed year-books Category (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Year 2009 
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