Number of the records: 1  

Journal of Vacuum Science and Technology B

  1. Title statementJournal of Vacuum Science and Technology B : Microelectronics and Nanometer Structures Processing, Measurement and Phenomena
    Abbreviated titleJ. vac. sci. technol., Pt B
    Key TitleJournal of vacuum science and technology. B. Microelectronics and nanometer structures processing, measurement and phenomena
    Issue dataNew York : American Vacuum Society
    American Institute of Physics
    ISSN1071-1023
    Note200 Journal of vacuum science and technology. CC: B. NC: Microelectronics and nanometer structures processing, measurement and phenomena. 100 19960805a19919999m__y0sloy0103____ba. 430 Journal of vacuum science and technology. B, Microelectronics processing and phenomena ISSN 0734-211X. Vychádza 6x ročne. 207 1991-----. 110 aga
    UDC533.5
    62
    CountryUnited States
    LanguageEnglish
    Document kindBCA - periodiká
    References (34) - xjcp
    Impact factor1.687; 1.605; 1.549; 1.610; 1.600; 1.664; 1.626; 1.597; 1.419; 1.445; 1.460; 1.341; 1.341; 1.267; 1.358 1.358; 1.464; 1.398; 1.573; 1.314; 1.351
    journal

    journal

Number of the records: 1  

  This site uses cookies to make them easier to browse. Learn more about how we use cookies.