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Microsensors, MEMS, and smart devices
Title statement Microsensors, MEMS, and smart devices Main entry-name Gardner, Julian W. (Author) Another responsib. Varadan, Vijay K (Author) Awadelkarim, Osama O (Author) Issue data Chichester : John Wiley & Sons, 2001 Phys.des. 503 s ISBN 0-471-86109-X Subj. Headings Mikroelektronika fyzika polovodičov polovodičové materiály mikromechanika MEMS mikrosenzory mikrostereolitografia fyzika tuhých látok mikromechanické zariadenia UDC 621.382.049.7 621.315.592 538.9 681.586 Country uk Language English Document kind AUC - učebnica 
book
Barcode Call number of location Call number Location Sublocation Info 284EK84362 E*84362 Fakulta elektrotechniky a informatiky Katedra mikroelektroniky FEI unavailable
Number of the records: 1