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Handbook of Microlithography, Micromachining, and Microfabrication. Vol. 1
Title statement Handbook of Microlithography, Micromachining, and Microfabrication. Vol. 1 : Microlithography Main entry-name Rai-Choudhury, P. (Compiler) Issue data London : The Institution of Electrical Engineers, 1997 Bellingham : SPIE - The International Society for Optical Engineering, 1997 Phys.des. 768 s ISBN 0-8194-2378-5 Subj. Headings mikrolitografia mikroobrábanie mikrovýroba nanotechnológie integrované obvody polovodičové zariadenia polovodičové súčiastky UDC 621.315.592 621.793/.795 621.382 Country uk ; United States Language English Document kind AUC - učebnica 
book
Barcode Call number of location Call number Location Sublocation Info 284EK84918 E*84918 Fakulta elektrotechniky a informatiky Katedra mikroelektroniky FEI unavailable
Number of the records: 1