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Stimulation of the Nucleation of Diamond in a HF CVD Reactor

  1. Title statementStimulation of the Nucleation of Diamond in a HF CVD Reactor
    Main entry-name Kadlečíková, Magdaléna, 1956- (Author) - FEI Ústav elektroniky a fotoniky
    Another responsib. Daniš, Tibor (Author) - FEI Katedra mikroelektroniky
    Vojačková, Anna (Author)
    Szabó, Peter (Author)
    Ligás, Radoslav (Author)
    Vojs, Marian, 1979- (Author) - FEI Ústav elektroniky a fotoniky
    Balon, František - (Author) - FEI Katedra mikroelektroniky
    Breza, Juraj, 1951- (Author) - FEI Ústav elektroniky a fotoniky
    Translated titleStimulácia nukleácie diamantového rastu v HF CVD reaktore
    In Mechatronika 2003 : Proceedings of 6th International Symposium on Mechatronics. -- Trenčianske Teplice : GC TECH, Ing Peter Gerši, 2003. -- ISBN 80-88914-92-2. -- s.181-186
    LanguageEnglish
    Document kindRZB - článok zo zborníka
    CategoryAFD - Reports at home scientific conferences
    References (1) - článok
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Number of the records: 1