Analysis of capacitive MEMS sensor for small accelerations

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Title statement	Analysis of capacitive MEMS sensor for small accelerations / aut. Štefan Chamraz, Richard Balogh
Main entry-name	Chamraz, Štefan, 1953- (Author) - FEI Ústav automobilovej mechatroniky
Another responsib.	Balogh, Richard, 1969- Z1 (Author) - FEI Ústav automobilovej mechatroniky
In	2018 Cybernetics & Informatics (K&I) / 2018 International Conference Cybernetics & Informatics (K&I). -- Bratislava : Slovak Chemical Library, 2018. -- ISBN 978-1-5386-4420-1. -- USB, [5] s.
Subj. Headings	capacitive sensor
	bridge feedback system
	disturbance observer
	unstable systems
Language	English
URL	https://ieeexplore.ieee.org/document/8337555/
Document kind	RZB - článok zo zborníka
Category	AFD - Reports at home scientific conferences
Category (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Year	2018

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Number of the records: 1