- Nano imprint lithography -Issues at the de-molding process
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Nano imprint lithography -Issues at the de-molding process

  1. Nanoimprint lithography. resist mr-UVCur21. defect. adhesionŠkriniarová, Jaroslava, 1954- Nano imprint lithography -Issues at the de-molding process / aut. Jaroslava Škriniarová, Jaroslav jr Kováč, František Uherek, Juraj Nevřela. Kováč, Jaroslav jr. 1977-. Uherek, František, 1954-. Nevřela, Juraj, 1989- In: MNE 2018 MNE 2018 conference. -- Copenhagen : Congress Department, 2018. -- online, Arch. no. PO-01-086 [2] s.
Number of the records: 1  

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