boron doped diamond. plasma etching. Self-masking. nanostructured surfaceMarton, Marián, 1980- Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching / aut. Marián Marton, Mário Ritomský, Pavol Michniak, Miroslav Behúl, Vlastimil Řeháček, Robert Redhammer, Andrej Vincze, Martin Papula, Marian Vojs. -- 2-s2.0-85072529136. -- 000498325300002. -- 10.1016/j.vacuum.2019.108954. Ritomský, Mário, 1993-. Michniak, Pavol, 1986-. Behúl, Miroslav, 1989-. Řeháček, Vlastimil, 1957-. Redhammer, Robert, 1963-. Vincze, Andrej, 1975-. Papula, Martin. Vojs, Marian, 1979- In: Vacuum. -- ISSN 0042-207X. -- Vol. 170, (2019), Art. no. 108954 [6] s.