Number of the records: 1
HF CVD
SYS 0007410 LBL 00000nz--a22^^^^^n--4500 003 SK-STU 005 20200124143250.9 008 151215|n|acnnnbabn-----------n-ana-----d 040 $a STU $b slo 150 $a HF CVD 450 $a hot filament chemical vapour deposition 980 $x K
Number of the records: 1