Number of the records: 1
DC Magnetron Sputtering
SYS 0103037 LBL 00000nz--a22^^^^^n--4500 003 SK-STU 005 20220620103107.7 008 220620|n|acnnnbabn-----------n-ana-----d 040 $a STU $b slo 150 $a DC Magnetron Sputtering 980 $x K
Number of the records: 1