- Raman spectroscopy used to assess the temperature and mechanical stre…
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Raman spectroscopy used to assess the temperature and mechanical stress in thin films of microelectronic structures

  1. KADLEČÍKOVÁ, Magdaléna et al. Raman spectroscopy used to assess the temperature and mechanical stress in thin films of microelectronic structures. In IMAPS flash conference 2017 [elektronický zdroj] : 3rd International microelectronics assembly and packaging society. Brno, Czech Republic. November 9-10, 2017. Brno : University of Technology, 2017, USB, [2] s. ISBN 978-80-214-5535-1. E*303/UEF/2017
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