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Raman spectroscopy used to assess the temperature and mechanical stress in thin films of microelectronic structures
- KADLEČÍKOVÁ, Magdaléna et al. Raman spectroscopy used to assess the temperature and mechanical stress in thin films of microelectronic structures. In IMAPS flash conference 2017 [elektronický zdroj] : 3rd International microelectronics assembly and packaging society. Brno, Czech Republic. November 9-10, 2017. Brno : University of Technology, 2017, USB, [2] s. ISBN 978-80-214-5535-1. E*303/UEF/2017
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