- Direct deposition of CVD diamond layers on top of GaN membranes
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Direct deposition of CVD diamond layers on top of GaN membranes

  1. Direct deposition of CVD diamond layers on top of GaN membranes / aut. Tibor Izsák, Gabriel Vanko, Milan Držík, Stephan Kasemann, Johann Zehetner, Marian Vojs, Bohumír Zaťko, Štěpán Potocký, Alexander Kromka
    Izsák Tibor  Vanko Gabriel Držík Milan Kasemann Stephan Zehetner Johann Vojs Marian ; 033000 Zaťko Bohumír Potocký Štěpán Kromka Alexander
    4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems : . Art. no. 35 [3] s.
    GaN MEMS CVD diamond intrinsic stress
    https://www.mdpi.com/2504-3900/56/1/35
    článok zo zborníka
    AFC - Reports at international scientific conferences
    V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
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