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Materials Science in Semiconductor Processing

  1. Title statementMaterials Science in Semiconductor Processing
    ISSN1369-8001
    1873-4081 (online)
    Document kindBCA - periodiká
    References (17) - xjcp
    Impact factor0.419; 0.608; 0.394; 0.672; 0.884; 1.038; 0.655; 1.158; 0.388; 0.753; 0.753; 1.338; 1.761; 1.955; 2.264; 2.359; 2.593; 2.722; 3.085; 3.927; 4.644; 4.1; 4.2; 4.6
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