Thick Film Sensor for Temperature Balanced Process Monitoring

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Title statement	Thick Film Sensor for Temperature Balanced Process Monitoring
Main entry-name	Řezníček, Zdeněk (Author)
Another responsib.	Szendiuch, Ivan (Author)
	Řezníček, M. (Author)
	Tvarožek, Vladimír, 1943- (Author) - FEI Ústav elektroniky a fotoniky
In	IMAPS. 40th International Symposium on Microelectronics : San Jose, USA, 11.-15.11.2007. -- Washington : IMAPS, 2007. -- s.CD-Rom
Language	English
Document kind	RZB - článok zo zborníka
Category	AFC - Reports at international scientific conferences
Category (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Year	2007

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Number of the records: 1