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Application of polyimide films in microelectronics = Využitie polyimidových vrstiev v mikroelektronike

Title statement	Application of polyimide films in microelectronics = Využitie polyimidových vrstiev v mikroelektronike : V. odb. 26-13-9. Obhajoba 21.11.2001
Main entry-name	Andok, Robert (Author)
Another responsib.	Csabay, Otto, 1937- (Thesis advisor) - FEI Katedra mikroelektroniky
	Hudek, Peter (Thesis advisor)
Issue data	Bratislava : STU v Bratislave FEI, 2001
Phys.des.	133 s
Subj. Headings	elektronika
	Mikroelektronika
	polovodičové štruktúry
	príprava tenkých vrstiev
	fyzika polovodičov
	polyimidy
	iónové leptanie
UDC	538.975
	539.23
	621.315.592
	678.745.2
Language	Slovak
Copy count	1, currently available 1
Document kind	DDZ - dizertačná práca
Category	DAI - Qualificational works (thesis, habilitation, atestation...)

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Number of the records: 1