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Tenké vrstvy nitridov a oxidov kovov pre aplikácie v mikroelektronike a senzorike

  1. HOTOVÝ, Ivan. Tenké vrstvy nitridov a oxidov kovov pre aplikácie v mikroelektronike a senzorike : Obhaj. 8.2.2005. Bratislava : STU v Bratislave FEI, 2004. preruš.str.

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