Title information : Atmospheric pressure microwave plasma for aluminum surface cleaning / aut. Lucia Bónová, Weikun Zhu, Dhruval K Patel, Daniel V Krogstad, David N Ruzic Variant heading : \q12*stu_us_auth*1 stu130166 \q \q1013 stu_us_auth*stu130166 \d Bónová Lucia \q ; 067000  %continue : \q12*stu_us_auth*1 0045031 \q \q1013 stu_us_auth*0045031 \d Zhu Weikun \q \q12*stu_us_auth*1 0045032 \q \q1013 stu_us_auth*0045032 \d Patel Dhruval K. \q \q12*stu_us_auth*1 0045033 \q \q1013 stu_us_auth*0045033 \d Krogstad Daniel V. \q \q12*stu_us_auth*1 0045034 \q \q1013 stu_us_auth*0045034 \d Ruzic David N. \q In : \q12**1 0079829 \q %continue : Journal of vacuum science and technology. Part A. Vacuum, surfaces and films %continue : . Vol. 38, iss. 2 (2020), s. 1-6 URL : https://avs.scitation.org/doi/full/10.1116/1.5132912 Document kind : článok z periodika Category : ADC - Scientific titles in foreign carented magazines and noticed year-books Category (from 2022) : V3 - Vedecký výstup publikačnej činnosti z časopisu