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- Transport in Laser Microfabrication : Fundamentals and Applications
Grigoropoulos Costas P.
Cambridge : Cambridge University Press, 2009 . - 400 s
ISBN 978-0-521-82172-8
mikrovýroba laser
monografiaFaculty Available Inaccesible Issued For Request Only MTF 0 1 0 0 
book
- Handbook of Microlithography, Micromachining, and Microfabrication. Vol. 1 : Microlithography
Rai-Choudhury P. (Compiler)
London : The Institution of Electrical Engineers, 1997
Bellingham : SPIE - The International Society for Optical Engineering, 1997 . - 768 s
ISBN 0-8194-2378-5
mikrolitografia mikroobrábanie mikrovýroba nanotechnológie integrované obvody polovodičové zariadenia polovodičové súčiastky
učebnicaFaculty Available Inaccesible Issued For Request Only FEI 0 0 0 1 book