capacitive sensor. bridge feedback system. disturbance observer. unstable systemsChamraz, Štefan, 1953- Analysis of capacitive MEMS sensor for small accelerations / aut. Štefan Chamraz, Richard Balogh. -- 8337555. -- 10.1109/CYBERI.2018.8337555. -- 000454633500026. -- 2-s2.0-85050935463. Balogh, Richard, 1969- In: 2018 Cybernetics & Informatics (K&I). -- 1. vyd.. -- 978-1-5386-4420-1 2018 International Conference Cybernetics & Informatics (K&I). -- Bratislava : Slovak Chemical Library, 2018. -- USB, [5] s.