621.382.049.77. 538.9. 681.586. 061.3(08) polovodičové zariadenia. Mikroelektronika. senzory. fyzika polovodičov. mikromechanické zariadenia. mikrosystémyDonoval, Daniel, 1953- ASDAM 2002. The Fourth International Conference on Advanced Semiconductor Devices and Microsystems : Smolenice, Slovakia. 14.- 16. Oct. 2002 / Zost.: J. Breza, D. Donoval. -- Piscataway : Institute of Electrical and Electronics Engineers, 2002. -- 380 s. -- ISBN : 0-7803-7276-X. Breza, Juraj, 1951-