Direct deposition of CVD diamond layers on top of GaN membranes

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Title statement	Direct deposition of CVD diamond layers on top of GaN membranes / aut. Tibor Izsák, Gabriel Vanko, Milan Držík, Stephan Kasemann, Johann Zehetner, Marian Vojs, Bohumír Zaťko, Štěpán Potocký, Alexander Kromka
Main entry-name	Izsák, Tibor (Author)
Another responsib.	Vanko, Gabriel Z5 (Author)
	Držík, Milan, 1949- (Author)
	Kasemann, Stephan (Author)
	Zehetner, Johann (Author)
	Vojs, Marian, 1979- Z2 (Author) - FEI Ústav elektroniky a fotoniky
	Zaťko, Bohumír (Author)
	Potocký, Štěpán (Author)
	Kromka, Alexander, 1971- (Author)
In	4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems / International Conference nanoFIS 2020 - Functional Integrated nanoSystems. -- Basel : MDPI, 2020. -- ISSN 2504-3900. -- Art. no. 35 [3] s.
Subj. Headings	GaN
	MEMS
	CVD
	diamond
	intrinsic stress
Language	English
URL	https://www.mdpi.com/2504-3900/56/1/35
Document kind	RZB - článok zo zborníka
Category	AFC - Reports at international scientific conferences
Category (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
In databases
Year	2020

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Number of the records: 1