Design of athermal SiON waveguide structure for telecom photonics integrated circuits

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Title statement	Design of athermal SiON waveguide structure for telecom photonics integrated circuits /
Main entry-name	Chovan, Jozef, 1974- (Author) - FEI Ústav elektroniky a fotoniky
Another responsib.	Uherek, František, 1954- Z1 (Author) - FEI Ústav elektroniky a fotoniky
	Seyringer, Dana (Author)
	Dohnal, Fadi (Author)
	Seyringer, Heinz (Author)
	Látal, Jan (Author)
	Šiška, Petr (Author)
In	23rd Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics / Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics. -- Bellingham : SPIE, 2025. -- ISBN 9781510688087. -- Art. no. 135080P [4] s.
Subj. Headings	athermal
	linear expansion
	optical waveguide
	photonics integrated circuit
	PMMA
	SiON
	thermal optical coefficient
Language	English
Document kind	RZB - článok zo zborníka
Category	AFD - Reports at home scientific conferences
Category (from 2022)	V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka
Type of document	príspevok z podujatia
In databases
Year	2025

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